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Novx 7000

토탈 정전기 컨트롤 시스템

The Novx Series 7000 Process Monitoring System is a multi-purpose microprocessor-based instrument for monitoring critical electrostatic related parameters in workstation and process environments. The six dedicated channels customize the instrument for the monitoring field voltage detection/ionizer balance, ESD event, body voltage detection or ground monitoring and particle counting.

Features

ᆞSmart Signal 프로세싱, 멀티플 센서 및 안테나 종류
ᆞDaisy chainable(다중 연결) 가능; RS-485 or Ethernet 출력
ᆞESD 이벤트 감지 추적
ᆞ세 가지 옵션의 필드 전압 모니터
ᆞ알람 설정 프로그래밍을 통한 자동 메시지 기능
ᆞ장비에 연동 된 컴퓨터에 Closed-loop 컨트롤 가능
ᆞ플러그인 모듈로 업그레이드 가능

SPECIFICATIONS

 

Field Sensing
 

 
Input Voltage
 
±15 - ±5000V
Output Voltage
 
0 - ±5.0
 
Accuracy±1V for <20V; ±5% for >20V 
 
ESD Event Detection
 
CDM / HBM
 
Particle Counter Interface
 
Data Acquisition
 
Body Voltage Detection 
 

 
Applied Voltage
 
<0.5V
Accuracy±0.5V 
 
GND Monitoring
 

 
Range
 
1-20 ohms
 
Applied Voltage
 
<0.5V
Accuracy0.5 ohms 
 
General
 
Dimension2.7W x 7H x 5.5D in. (6.9 x 17.8 x 14 cm)
 
Weight2.5 lb (1.4 kg)

 

Accessories

Documents

Mounting Bracket

Passive Antennas

Cable Assembly for Ionizer Feedback

Cable Adapter

Micro ESD Antennas

Micro ESD Directional Antenna

RS-485 Board

RJ Interface Cable

Ethernet Board

Cat 5e with RJ-45 Ethernet Cable