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Semi-conductor (front and back-end)

Air ionization maintains the integrity of cleanrooms and products by neutralizing static charge on fab surfaces. Our ionization products range from digital systems that manage and automate cleanroom and EFEM ionization to specialty ionizers inside tools that withstand extreme temperatures, fit into tight areas, or integrate into air lines to ionize airflows. Our Novx product line adds to our sensor capabilities with closed-loop integration to monitor the manufacturing environment.